M-Z型硅基ARROW压力传感器设计  

Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor

作　　者：肖素艳[1] 王东红[1] 刘晓为[1] 秦建勇[1] 

机构地区：[1]哈尔滨工业大学MEMS中心,黑龙江哈尔滨150001

出　　处：《微纳电子技术》2003年第7期429-431,437,共4页Micronanoelectronic Technology

摘　　要：分析了M Z型硅基ARROW压力传感器的结构设计参数 ,并用计算机软件ANSYS对如下参数进行有限元方法 (FEM )研究 ,模拟了硅弹性膜片应力分布 ,确定了弹性膜边缘是传感臂具有高灵敏度的理想位置 。The structure parameters of M Z Si based ARROW pressure sensors for optimized design are presented and studied by the finite element method with the computer software ANSYS:the edge of the diaphragm located on the sensing arm is the desirable position for high sensitivity. Based on this, the phase change induced in the sensing arm caused by photoelastic effect is calculated, and the linear relationship between the phase change in the sensing arm and the applied pressure is finally obtained.

关 键 词：M-Z型 硅基ARROW 压力传感器 结构设计 抗共振反射光波导 有限元方法 光弹性效应 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]