一种小型微波等离子炬装置  

A Compact Device for Microwave Plasma Torch

作　　者：温卓宾 曾葆青[1] 吴喆[1] 彭志伟[1] 

机构地区：[1]电子科技大学物理电子学院,四川成都610054

出　　处：《真空电子技术》2015年第5期63-66,共4页Vacuum Electronics

摘　　要：简要介绍了微波等离子体以及微波谐振炬点火器的应用研究情况。基于四分之一波长同轴谐振腔基本理论,采用电磁仿真软件HFSS设计出的一种微波等离子炬装置,在输入功率为5 W,腔体内电场可达到30kV/cm(标准气压下空气被击穿的电场强度),从而产生微波等离子体。This article briefly introduces the applications of microwave plasma and microwave resonant torch igniter.Based on the principle of the quarter-wavelength coaxial cavity resonator,a compact device for microwave plasma torch is designed by using 3Delectromagnetic simulation software HFSS.The electric filed strength inside the cavity can reach 30kV/cm(the breakdown electric field strength of air at standard pressure)at the input power of 5W,which motivates microwave plasma.

关 键 词：同轴谐振腔 微波谐振炬点火器 微波等离子体 

分 类 号：O53[理学—等离子体物理]