基于蒙特卡洛法溅射离子泵泵腔结构研究  

Influence of Chamber Structure on Pumping Performance of Sputter-Ion Pump:A Monte Carlo Simulation

作　　者：崔寓淏 窦仁超[1] 王凯[1] 马永强[1] 周雪茜 Cui Yuhao;Dou Renchao;Wang Kai;Ma Yongqiang;Zhou Xueqian(Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China)

机构地区：[1]北京卫星环境工程研究所,北京100094

出　　处：《真空科学与技术学报》2019年第2期107-110,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：采用蒙特卡洛方法对溅射离子泵腔抽气通道内的气体流动规律进行数值模拟。建立了不同溅射离子泵结构的几何模型,计算了气体分子在不同泵腔结构中进出比例,分析了腔结构对反流量的影响,得到了抽气组件在不同泵腔结构中的抽气效率,探讨各种类型腔结构的抽气特点;最后计算了舱体高度对抽气性能的影响。结果表明:在相同条件下,I型泵腔结构抽气性能最好,T型泵腔结构次之,双侧型泵腔结构抽气性能最差。The gas molecule flow in the vacuum chamber,housing a sputter-ion pump cathode,was mathematically formulated with free molecule flow model,theoretically analyzed and numerically simulated in Monte Carlo method with self-developed program.The influence of the chamber structures,including the 'I,T and U' shapes,on the reverse flow-rate,(or regurgitation) was investigated by calculating the inlet to outlet ratio of molecules.The simulated results show that the chamber structure has a major impact.To be specific,when it comes to the pumping performance under the same experimental conditions,the 'I-,T-and U-shaped' vacuum chambers can be listed in a descending order.In addition,the pumping performance was found to considerably depend on the distance between the outlet and the sputter-ion cathode of the sputter-ion pump.

关 键 词：溅射离子泵 蒙特卡洛方法 分子流 

分 类 号：TB752[一般工业技术—真空技术]