微光学元件面形的数字刀口检测技术  

Digital knife-edge testing technology on micro-optical surface characterization

作　　者：张艳[1] 张蓉竹[1] 董军[1] 张均[1] 蔡邦维[1] 

机构地区：[1]四川大学光电科学技术系,四川成都610064

出　　处：《强激光与粒子束》2004年第2期137-140,共4页High Power Laser and Particle Beams

摘　　要：　微列阵光学元件的质量评价是光学测量中的一项新课题。将传统的刀口检测技术进行数字化改进后,用于微光学元件的面形检测,具有实时、定量、精度高的特点,在光学元件质量评价中有着重要意义。介绍了应用数字刀口检测反射式微镜列阵面形质量的原理和实验装置,详细论述了对CCD采集的阴影图进行图像处理的关键步骤:(1)精确测定每个像素的暗场阈值所对应的刀口位置;(2)确定与像素相应的面形区域的倾角误差;(3)对面形进行重构。最后结合具体实验进行了分析和讨论,实验所测得的面形误差为nm量级。The evaluation of micro-array optical components is a task in the field of optical test. The improved Foucault knife-edge test technology has many advantages such as real time, digital, precision. This paper introduces the principle and the experimental set-up of knife-edge digital test of the surface characterization of micro-mirror array, and describes the key steps in processing the images of the micro-mirrors recorded by the CCD detector as: (1)precisely determine the knife-edge position correspond to the darkness threshold of every pixel; (2)determine the slope error of the surface area correspond to the given pixels; (3)reconstruct the examined surface. It also presents some elementary experimental results that the surface error is up to nm level.

关 键 词：微镜列阵 面形检测 刀口检测 数字化 光学测量 质量评价 微列阵光学元件 

分 类 号：TN247[电子电信—物理电子学] TP211.6[自动化与计算机技术—检测技术与自动化装置]