微尖的两种制作工艺  

Two fabrication processes of micro-tip

作　　者：王明亮[1] 王艳华[1] 郑剑铭[1] 孙道恒[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《传感器技术》2004年第2期74-76,79,共4页Journal of Transducer Technology

基　　金：福建省自然科学基金(A0110003);福建省科技计划重点项目(2002H022)

摘　　要：描述各向异性腐蚀结合键合和各向异性腐蚀结合电镀来制作微尖的方法,利用这两种方法制作出了针尖直径小于25nm的金字塔形微尖,通过实验证明:这是两种有良好可控性和工艺要求不高的制作方法。微尖的成功制作为传感器微型化提供了一种很有潜力的新型检测方式,解决了检测的灵敏度问题。Serial pyramid tips whose diameters are smaller than 25nm are designed and fabricated, utilizing anisotropic etching combining with banding and anisotropic etching combining with electroplating respectively. It is proved that these are two effective processes to fabricate micro-tip with well controllability and low processing restriction. The success of the fabrication of micro-tip provides a new kind of potential measuring mode for sensor miniaturization, which improves their sensitivity greatly.

关 键 词：微尖 制作工艺 各向异性 电镀 传感器微型化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]