射频CO_2激光陶瓷基板划片机光路设计及分析  

Design of beam delivery system for RF CO_2 laser ceramic substrate scriber

作　　者：侯廉平[1] 陈陪峰[2] 王圩[1] 

机构地区：[1]中国科学院半导体研究所国家光电子工艺中心,北京100083 [2]华中科技大学激光工程研究院,湖北武汉430074

出　　处：《光学精密工程》2004年第1期37-42,共6页Optics and Precision Engineering

摘　　要：介绍了RFCO2激光陶瓷基板划片的特点。分析了导光系统的设计原则,着重讨论了圆偏振镜和伽利略离焦望远镜的作用和特点。对导光系统进行了优化和模拟,给出了导光系统的光路图及成像质量图。试验结果和理论相符,系统划片速度可达10m/min,划缝宽度<0.1mm,划缝深度>0.3mm。The current requirements for laser ceramic substrate scriber systems are high light beam quality, fast scribing velocity, narrow scribing groove, small heat-affected zone, smooth cross-section, and independence of scribing quality from scribing direction. The light guide system designed can satisfy all the above-mentioned requirements, and it includes anamorphic lens, space filter, circular polarizer, Galileo defocusing telescope and focusing lens, and it has a scribing velocity of up to 10 m/min, a scribing width of less than 0.1 mm, and a scribing depth of more than 0.3 mm.

关 键 词：激光加工设备 陶瓷基板 划片机 光路 设计 导光系统 

分 类 号：TQ174.6[化学工程—陶瓷工业] TG665[化学工程—硅酸盐工业]