ICF分解实验中的平面调制靶和薄膜靶的研制  

Development of Surface Perturbation Target and Thin Silicon Foil Target Used to Research Rayleigh-Taylor Instability in Inertial Confinement Fusion Experiment

作　　者：周斌[1] 孙骐[1] 黄耀东[1] 沈军[1] 吴广明[1] 王珏[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092

出　　处：《原子能科学技术》2004年第1期79-83,共5页Atomic Energy Science and Technology

基　　金：863"高技术项目(2002AA844120;2002AA84ts17)

摘　　要：本工作研制了用于惯性约束聚变ICF分解实验模拟聚变靶丸表面粗糙度和驱动激光空间不均匀性对R T不稳定性作用的平面调制靶和平面薄膜靶。以激光干涉法结合图形转移工艺获得波长20～100μm、振幅0 0～4 0μm的正弦调制图形的模板,再将调制图形转移至溴代聚苯乙烯薄膜表面,制备出ICF实验用溴代聚苯乙烯平面调制箔靶;以半导体工艺结合自截止腐蚀工艺制得厚度4μm左右的自支撑Si平面薄膜靶。Si膜的表面粗糙度为几十纳米。对所研制的两种靶型的参数进行了测量。The development of the surface perturbation target and the thin silicon foil target used to research Rayleigh-Taylor instability in the resolved experiments of inertial confinement fusion are carried out. Based on the laser interference process combined with the figure-transfer process, the surface perturbation target with sine modulated perturbation is gotten, and the wavelength is 20-100 μm while the amplitude is several micrometers. The thin silicon foil with the thickness about 3-4 μm is prepared by semiconductor process together with heavy-doped self-stop etching. Combined with ion beam etching, the check or the stripe patterns are transferred to the surface of thin silicon foils, and then the silicon grating foil is obtained.

关 键 词：惯性约束聚变 平面调制靶 薄膜靶 ICF 表面粗糙度 溴代聚苯乙烯 

分 类 号：TL639[核科学技术—核技术及应用]