金属铜表面的三维齿状图形的化学微加工  

Chemical Microetching of Three-dimensional Gear-like Patterns on Copper Surface

作　　者：刘柱方[1] 蒋利民[1] 汤儆[1] 刘品宽[2] 孙立宁[2] 田中群[1] 田昭武[1] 

机构地区：[1]厦门大学固体表面物理化学国家重点实验室,化学系厦门361005 [2]哈尔滨工业大学机器人研究所

出　　处：《应用化学》2004年第3期227-230,共4页Chinese Journal of Applied Chemistry

基　　金：科技部"八六三"计划资助项目 (2 0 0 2AA40 4170 )

摘　　要：运用约束刻蚀剂层技术 (CELT)在金属铜 (Cu)表面实现了三维微图形加工 ,取得成功的关键因素在于寻找到能对Cu进行有效CELT加工的化学刻蚀和捕捉体系。采用规整的三维齿状结构为模板 ,在Cu表面得到了与齿状结构模板互补的三维微结构。采用扫描电子显微镜 (SEM )和原子力显微镜 (AFM )对所刻蚀图案进行表征 ,证实CELT可用于金属表面三维微图形的刻蚀加工。The chemical microetching on copper surface with three-dimensional(3D) gear-like molds was realized by confined etchant layer technique(CELT). By using effective chemical etching and scavenging system(HNO 3+NaOH) and the optimized experimental parameters, such as the etching time, etching current density, concentration of etchant or scavenger, the etched patterns were obtained, which is close to negative copy of the mold. The etched micro-patterns characterized by SEM and AFM demonstrates that CELT can be applied to the 3D-microstructure replication on copper surface.

关 键 词：约束刻蚀剂层技术(CELT) 金属铜 三维微加工 化学刻蚀 

分 类 号：O646.6[理学—物理化学]