一种新型微机电系统可调光衰减器  

A Novel Variable Optical Attenuator Based on Micro-Electromechanical System(MEMS)

作　　者：袁野[1] 邹勇卓[1] 鲍俊峰[1] 曹钟慧[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室

出　　处：《光学学报》2004年第3期364-368,共5页Acta Optica Sinica

摘　　要：一种新型的低成本、小体积的电磁驱动微机电系统可调光衰减器 ,可用于密集波分复用系统中各信道的动态增益平衡。该器件采用电磁线圈驱动绕 10 0微轴转动的微反射镜 ,运动部件行程极小。驱动电压为 0～ 8V ,工作范围 0～ 35dB ,动态响应时间小于 2ms ,插入损耗小于 0 .8dB ,回波损耗小于 - 5 0 .5dB。器件采用微细电火花加工技术制作 ,加工精度为微米量级 ,技术成熟 ,工艺简单 ,易于批量生产。采用有限元分析软件ANSYS对器件的结构建模 ,对电磁场及衰减曲线进行了理论分析 ,并与实测数据进行了比较 。A novel variable optical attenuator based on micro\|electromechanical system is reported. The variable optical attenuator employs a low cost simple structure design, capable of fast dynamic response (<2 ms), wide dynamic range (0～35 dB), low return loss (<-50 dB) and wide bandwidth. By utilizing precise electrical\|discharge machining as an enabling technology, the design incorporates an electro magnetically actuated silicon mirror rotating around a 100 μm shaft and a miniature driven coil. The attenuation response is compared with the calculated result from a numerical theoretical model by using ANSYS, a finite element analysis software package, and a reasonably good agreement was obtained. The variable optical attenuator is scalable to a discrete array to implement dense wavelength division multiplexing channel equalization in various networking devices.

关 键 词：可调光衰减器 微机电系统 电火花加工 密集波分复用 动态增益平衡 插入损耗 回波损耗 有限元分析 

分 类 号：TN715[电子电信—电路与系统]