Si_3N_4微尺度薄膜比热特性测量研究  

Research on Specific Heat of Silicon Nitride Thin Membrane

作　　者：宋青林[1] 夏善红[1] 陈绍凤[1] 张建刚[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,100080

出　　处：《测控技术》2004年第3期5-6,9,共3页Measurement & Control Technology

基　　金：国家"973"资助项目 (G19990 3 3 10 2 )

摘　　要：比热是Si3 N4薄膜重要的热学参数之一 ,Si3 N4薄膜比热特性研究对热传原理传感器研究和发展以及物质微尺度热学特性的研究有重要的意义。本研究设计并制作出一种悬膜结构 ,从理论上分析了此结构的传热机理 ,并通过实验测得Si3 N4薄膜的比热 ,最后分析了此测量系统存在的误差及解决方法。Specific heat is one of the most important thermal parameters for silicon nitride thin membrane.The study of the specific heat is very useful to research and develop the sensors which base on the theory of heat transfer,and explore the thermal characteristics of micro-scale objects.For researching on specific heat of silicon nitride thin membrane,a kind of floating membrane was designed.And heat transfer mechanism of the floating membrane is analyzed.The specific heat of Si_3N_4 floating membranes with different thickness are obtained from experiments.In the end,the measuring inexactness is discussed and some ways are put forward to solve it.

关 键 词：比热 悬膜 温度系数 

分 类 号：O484.4[理学—固体物理]