基于MEMS的微推进系统的研究现状与展望  

An Review of MEMS-based Micropropulsion Developments

作　　者：尤政[1] 张高飞 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《微细加工技术》2004年第1期1-8,共8页Microfabrication Technology

基　　金：国家863高技术研究计划资助项目(863 701 2002AA715131)

摘　　要：重点介绍了目前国内外各种MEMS微推进系统的研究现状和不同微推进系统的技术特点,阐述了基于MEMS技术的微推进系统基本特征,并分析了MEMS微推进系统的发展趋势和面临的挑战。Recently,as the development of microsatellites, a new type of microthruster is required imminently. Presented is the current development status of MEMS-based micropropulsion systems at home and abroad,including the electrical micropropulsion system and the chemical one.The technical features of the different systems are introduced.The basic characteristics of the MEMS-based micropropulsion system and the trend and challenge for it are analyzed and discussed.

关 键 词：MEMS 微推进系统 微型卫星 发展现状 电推进系统 

分 类 号：V43[航空宇航科学与技术—航空宇航推进理论与工程]