射频CO_2激光陶瓷基板划片机光路设计及分析  

The design of beam delivery system of RF CO_2 laser ceramic substrate scriber

作　　者：侯廉平[1] 陈培峰[2] 王圩[1] 朱洪亮[1] 

机构地区：[1]中国科学院半导体研究所国家光电子工艺中心,北京100083 [2]华中科技大学激光技术与工程研究院,武汉430074

出　　处：《激光技术》2004年第2期137-140,共4页Laser Technology

摘　　要：介绍了RFCO2 激光陶瓷基板划片的特点。分析了导光系统的设计原则 ,讨论了圆偏振镜和伽利略离焦望远镜的作用和特点。对导光系统进行了优化和模拟 ,给出了导光系统的光路图及成像质量图。试验结果和理论相符。The characteristic of RF CO 2 laser ceramic substrate scribing has been presented. The design principle of beam delivery system is analyzed. Function and characteristic of circular polarizer and Galileo defocusing telescopic system are particularly discussed. The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.The experimental outcome conforms to theory. Processing quality to alumina ceramic substrate by our scriber is up to that of the same kind of foreign products.

关 键 词：陶瓷基板 划片机 光路 设计 

分 类 号：TN248.22[电子电信—物理电子学]