光学元件损伤在线检测装置及实验研究  

Online inspection apparatus and experiments on optics damage

作　　者：任冰强[1] 黄惠杰[1] 张维新[1] 赵永凯[1] 韩广礼[1] 杜龙龙[1] 王树森[1] 路敦武[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《强激光与粒子束》2004年第4期465-468,共4页High Power Laser and Particle Beams

基　　金：国家863计划项目资助课题

摘　　要：　利用暗场成像原理,研制成功一套应用于大型激光装置的光学元件损伤在线检测装置,并在多程放大系统上进行了实验研究。与传统的检测手段相比,该检测装置可以实现对光学系统的在线检测,并可对损伤点的图像进行分析处理,最后提出通过减小像差和扩大检测范围的方法来改进该装置的检测效果。An online inspection apparatus of optics damage in large scale laser facility is developed applying dark-field imaging technology. Experiments were carried out on a multi-pass amplifier. Optical defects, such as film damage, self-focusing filament and cranny on optical elements are inspected. Experimental results show that this apparatus can be used for online inspection of optics damage. Further improvements. that the image aberration should be decreased and the inspection range be extended are proposed.

关 键 词：光学元件 光学损伤检测 暗场成像技术 

分 类 号：TH247[机械工程—机械制造及自动化]