压力传感器灵敏度电压非线性分析  

Analyzing Electric Nonlinearity for Sensitivity in Pressure Sensors

作　　者：宋青林[1] 孙以材[2] 多旭亮[3] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100080 [2]河北工业大学,天津300130 [3]天津化工研究设计院,天津300133

出　　处：《电子器件》2004年第1期31-34,共4页Chinese Journal of Electron Devices

基　　金：国家"973"项目(G1999033102);国家自然科学基金(69672015)

摘　　要：实验发现压阻型压力传感器的压力输出信号与外加电压并不是线性关系,存在着灵敏度电压非线性。本文指出组成压阻型压力传感器电桥的电阻受温度、输入电压、压力的共同影响,在此基础上提出非线性扩散电阻的多维模型。依据此理论模型,对灵敏度电压非线性现象的成因进行了理论分析,并利用其中受电压控制的电压源及其扩展功能来模拟非线性扩散电阻在电路的等价作用,进而显示出压力传感器灵敏度电压非线性的成因。That the pressure signal is not linear with input voltage for pressure sensors found in experiments. The phenomenon is called electric nonlinearity for sensitivity. The nonlinear resistors, forming the bridge in pressure sensor, are influenced by temperature, input voltage and pressure together. And a muti-dimension model for nonlinear resistors is put forward. According to the model, the reasons for electric nonlinearity for sensitivity aro analyzed. This paper points out that the equivalent functions of nonlinear resistors in the circuit can be simulated by a voltage-controlled source and its expansion function, showing the behavior of electric nonlinearity for sensitivity.

关 键 词：压力传感器 零点电漂移 灵敏度电压非线性 

分 类 号：TN389[电子电信—物理电子学]