基于Krylov子空间法的MEMS降阶建模与仿真  

MODEL ORDER REDUCTION AND SIMULATION OF MEMS BASED ON KRYLOV SUBSPACE

作　　者：孙道恒[1] 马海阳[1] 李文望[1] 

机构地区：[1]厦门大学机电工程系,厦门361005

出　　处：《机械工程学报》2004年第5期58-61,共4页Journal of Mechanical Engineering

基　　金：国家自然科学基金(50275127)

摘　　要：获得系统的宏模型是MEMS系统级建模与仿真的关键。将Krylov子空间理论与方法应用于MEMS降阶建模,介绍了Krylov子空间的理论基础,针对MEMS中常见的静电—结构耦合系统,建立了有限元动力学方程,运用修正Arnoldi算法得到降阶模型。算例表明,经大幅度降阶得到的模型真实地反映了系统地运动状态,大大缩短了求解时间,降低了计算复杂度。Obtaining the macro model of MEMS is the key of MEMS system-level modeling and simulation. The Krylov subspace theory and method are applied to get reduced order model of MEMS, and the theoretical foundation of Krylov subspace is introduced. For the common MEMS coupling with static-electrical and structure, the FEM functions are built, and its reduced order model can be obtained by using modified Arnoldi algorithm. It's shown from example that the reduced order model describes really the dynamics of the original system, while the computing time and complexity are reduced to a great extent.

关 键 词：MEMS 子空间 宏模型 耦合 有限元 

分 类 号：TN402[电子电信—微电子学与固体电子学]