采用三向光纤照明成像的三维微结构观测系统  

Observation and measurement system for microstructure based on three-direction fiber illumination

作　　者：张麟[1] 陈涛[1] 刘世炳[1] 左铁钏[1] 

机构地区：[1]北京工业大学激光工程研究院激光微技术实验室,北京100022

出　　处：《光学精密工程》2004年第3期275-281,共7页Optics and Precision Engineering

基　　金：国家自然科学基金(50175002);"863"计划(2002AA404160);北京市自然科学基金(3031001);北京市科技新兴计划的资助。

摘　　要：为弥补普通光学显微镜照明系统的不足,针对一般三维微结构的显微成像,提出并设计了一个可实现实时调节的三向光纤照明成像观测系统。系统采用计算机、D/A卡、驱动电路等硬件以及自主研制的控制软件,实现对任一光源的光强进行稳定连续的实时调节。通过自主设计的机械结构将光源、光纤、耦合头以及显微镜连接为一整体,实现光束入射方向、入射角和入射距离的任意调节。与通常的底部透射光照明系统进行实验比较,成像质量显著提高,不仅可以清晰观察目标对像的表面结构,还能得到立体感强的三维图像。针对面阵CCD显微测量系统的标定和标定误差问题,提出了螺旋微缝标定法。将螺旋测微计两铁钻形成的微缝作为标定的样本,配以适当的观测手段和计算方法,有效地消除或减小了各种误差,提高了系统的标定精度。通过系统标定和测量比较,系统的标定精度达到±0.0015μm,测量精度达到±1μm。实验结果表明,螺旋微缝标定法可以基本满足CCD测量系统标定的要求。This paper introduces a new three direction illumination system with light intensity, angle of incidence and distance of incidence precisely real-time regulated is proposed for observation of 3D microstructure of MEMS. Three-dimensional images and the surface of the microstructure can be achieved by using this system. In the process of designing the surface matrix CCD micro-measurement system, calibration errors have a direct effect on the measurement accuracy of the system. A new method, which is simpler, faster, more convenient and more applicable than the traditional method, is proposed to calibrate and reduce calibration errors. The calibration accuracy of the system is up to (±0.001 5) μm and its measurement accuracy is up to ±1 μm. This system is suitable for calibration at the level of micron.

关 键 词：微电机械系统 照明 电荷耦合器件 显微测量 标定误差 

分 类 号：TH703[机械工程—仪器科学与技术]