压阻式流速传感器研究  

Study on piezoresistive flow velocity sensor

作　　者：卢晓敏[1] 金建东[1] 董宇红[1] 赵异凡[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器技术》2004年第5期6-8,共3页Journal of Transducer Technology

摘　　要：介绍了一种流速传感器的工作原理、结构设计和关键工艺。该传感器基于毕托管的工作原理来测量流速,采用压阻式差压传感器测量流体中的总压与静压之差。整个装置体积小、重量轻,可实现便携式检测。对流速传感器的标定测试方法进行了探讨和试验验证,实际测量和使用表明:流速测量结果准确可靠,准确度达0.5%FS。The operation principle,structure design and key technique of a flow velocity sensor are presented.Based on the Pitot tube principle,the flow velocity is measured,and the piezoresistive differential pressure sensor is used to measure the difference between the total hydro-pressure and the static pressure.The device has the characteristics of small size,light weight and portable measurement.From the practical measurement and application,it is shown that the measurement result of flow velocity is reliable and the accuracy is 0.5 %FS.

关 键 词：压阻式 流速传感器 毕托管 流速测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH815[自动化与计算机技术—控制科学与工程]