EUV波段电光成像系统分辨率的实验研究  

The Experiment Study on the Resolution of Electro-Optical Imaging System at EUV Wave Band

作　　者：薛玲玲[1] 陈波[1] 李玉民[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《光谱学与光谱分析》2004年第5期529-531,共3页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金(69938020);中国科学院长春光机与物理研究所创新基金资助项目

摘　　要：基于微通道板 (MicrochannelPlate ,MCP)探测器件设计一套成像系统 ,用于对极紫外 (ExtremeUl traviolet,EUV)波段的光进行成像。结果在 13,17 1,19 5和 30 4nm处获得了一个宽度为 3mm的狭缝的像 ,其相应的空间分辨率分别为 85 ,12 0 ,182和 4 95 μm ,最佳为 85 μm ,对应波长 13nm ,而且波长越短 ,分辨率越高 ,图像的亮度也越高。An imaging system based on a Microchannel Plate(MCP) detector was designed to image the Extreme Utraviolet(EUV) light. The images of a 3 mm-width-slit were presented by this imaging system at the wavelengths of 13, 17.1, 19.5 and 30.4 nm respectively. Their corresponding spatial resolutions are 85, 120, 182 and 495 mum respectively. The best is 85 mum, corresponding to 13 nm. Moreover, the shorter the wavelength, the better the spatial resolution. So is the brightness of the image.

关 键 词：微通道板 极紫外波段光电成像系统 分辨率 探测器件 激光等离子体 

分 类 号：O435[机械工程—光学工程]