微条气体室(MSGC)基板材料的研究  

Research on the substrate materials of micro-strip gas chambers

作　　者：杨莹[1] 夏义本[1] 王林军[1] 张明龙[1] 汪琳[1] 苏青峰[1] 

机构地区：[1]上海大学材料科学与工程学院,上海201800

出　　处：《功能材料》2004年第3期360-362,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(60072033)

摘　　要：　根据微条气体室(MSGC)探测器的工作原理,分析了MSGC基板的选择依据,同时首次提出采用金刚石膜/硅复合材料作为MSGC基板的可行性。采用热丝辅助化学气相沉积(HFCVD)技术和相关退火工艺获得了金刚石膜/硅复合材料,并采用SEM、Raman光谱仪、微电流仪对复合材料的表面状况、结构、I V和C F特性进行了表征。结果表明,该复合材料经抛光后表面平整,退火后电阻率达约2.9×1010Ω·cm,电容值小且随频率变化稳定,均满足MSGC对基板材料的要求。On the basis of the working principle of microstrip gas chambers (MSGCs) and research progress on MSGCs' substrate material, the reason of choosing MSGCs' appropriate substrate was analyzed and the idea of using diamond film/silica composite material as the substrate of MSGCs was proposed. The diamond film/silica composite for MSGCs was obtained by HFCVD and related annealing technology. SEM images, Raman spectrum, and electric properties were investigated. The results indicate that the roughness of the composite substrate was rather low, and the resistivity increases to 2.9×1010 Ω&middotcm after annealing. The capacitance of the composite material was very small and almost has no variety with frequency.

关 键 词：微条气体室(MSGC) 探测器 基板 金刚石膜/硅复合材料 

分 类 号：TN304.18[电子电信—物理电子学]