双路激光-CCD零件尺寸动态检测仪的研制  

Research on the Part Dimensions of Double-path Laser-CCD Dynamic Measuring System

作　　者：陈明君[1] 赵清亮[1] 姜承宾[1] 李旦[1] 

机构地区：[1]哈尔滨工业大学精密工程研究所,哈尔滨150001

出　　处：《压电与声光》2004年第3期182-185,共4页Piezoelectrics & Acoustooptics

基　　金：哈尔滨市基金资助项目(0061218012)

摘　　要：提出了采用双路激光-CCD进行在线检测的方法,该方法采用激光三角测量原理,用双路激光-CCD同时对零件进行检测,以减小甚至消除自动输料过程中由振动或跳动等因素给零件带来的测量误差。文中给出了激光-CCD测量零件尺寸的原理,对零件运动过程中厚度尺寸的双路补偿原理进行了理论分析;设计研制了该动态检测系统;并用该系统进行了大量的实验研究,实验结果表明:该系统对动态零件的尺寸检测精度达到±0.3μm,能适用于零件在精密加工及自动化输送过程中的高精度检测,具有很好的工程实用性。In order to reduce or erase the parts measuring errors caused by vibration or run-out during automatic delivery, an on-line measuring method,which adopts the laser trigonometric measuring principle and uses double- path laser-CCD to measure parts errors is proposed in the paper. The principle of laser-CCD measuring parts dimensions is given, and double compensating principle of the parts thickness dimension during parts automatic delivery is analyzed. The dynamic measuring system is designed and manufactured, and lots of measuring experiments are carried out on this double-path laser-CCD system. Experimental results show that the dynamic measuring accuracy of the parts dimension is ±0.3 μm. It can be adopt in the parts precision machining or automatic delivery process with good engineering applicability.

关 键 词：激光-CCD 动态检测 双路补偿 信号处理 

分 类 号：TH165[机械工程—机械制造及自动化]