可调光衰减器的光衰减量线性补偿  

The Linearity Compensation of a Digital Micro-machining Based Variable Optical Attenuator

作　　者：曹钟慧[1] 晏辉鸣[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室

出　　处：《光子学报》2004年第7期826-829,共4页Acta Photonica Sinica

摘　　要：设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器 与传统可调光衰减器相比 ,该器件不仅可实现光衰减量数字化电控调节 ,并且可通过器件结构的优化设计 ,对光衰减量的非线性进行补偿 ,最终得到线性衰减 器件性能测试表明 ,插入损耗IL <0 .3dB ,偏振相关损耗PDL <0 .1dB ,波长相关损耗WDL <0 .2dB ,衰减范围 0～ 4 0dB ,回波损耗RL >5A novel micro-machining based digital MOEMS variable optical attenuator(VOA)was presented. The design of the VOA was optimized to achieve a linear response and digitized variation of attenuation. The characteristics of the device were analyzed with a scalar wave theory based numerical simulation. The performance test of the device showed a low insertion loss(0.3 dB), wave dependent loss(0.1 dB), return loss(>50 dB), and wide dynamic response(0～40 dB).

关 键 词：微光机电系统(MOEMS) 可变光衰减器 电磁驱动 微位移驱动器 

分 类 号：TN253[电子电信—物理电子学]