电场中微梁结构的建模与分析  

Modeling and Analysis of Micro Beam Structure under Electric Field Force

作　　者：黄昕[1] 刘青林[1] 崔升[1] 

机构地区：[1]复旦大学力学与工程科学系,上海200433

出　　处：《复旦学报（自然科学版）》2004年第3期418-421,共4页Journal of Fudan University：Natural Science

摘　　要：研究微机电系统 (MEMS)中微梁结构在非线性电场力下的振动问题 .重点讨论对非线性电场力的处理方法 ,建立相应的力学振动模型 ,用计算机仿真 (Simulink)模拟该模型 ,并用有限元的方法计算梁的振动 .Vibration of a micro beam structure under the nonlinear electric field force in MEMS is studied. The treatment method for the nonlinear electric force is discussed and the corresponding vibration model for micro beam is established. The model is simulated by Simulink and the vibration characteristics of the micro beam is analyzed by using finite element method. At last,the relations between the resonate frequency and the micro beam mass for different applied voltages are obtained.

关 键 词：微机电系统 微梁结构 建模 计算机仿真 非线性电场力 

分 类 号：TH-39[机械工程] TH113