CdSe薄膜的制备及其光学特性的研究进展  

Research Progress on the Preparation and Optical Properties of CdSe Thin Films

作　　者：孙康迅 邱美叶 孔惠颖 郑照轩 王淼 熊佳怡 赵春杰 王婧 李再金 乔忠良 李林 徐东昕 曲轶 

机构地区：[1]海南省激光技术与光电功能材料重点实验室,海南省院士团队创新中心,海南师范大学物理与电子工程学院,海南 海口

出　　处：《材料化学前沿》2023年第2期33-40,共8页Advances in Material Chemistry

摘　　要：本文主要介绍了CdSe薄膜的制备及其光学特性的国内外研究现状及进展。作为一种II-VI族化合物半导体薄膜,CdSe一直是国内外研究发展的热点。在CdSe薄膜的制备过程中,不同的制备方法都会对其性能有较大影响,因此有必要选择合适的制备方法来进行性能的优化和取舍选择。近年来,人们发展了各种技术制备CdSe薄膜,但现有的研究主要集中在使用电化学方法制备CdSe薄膜以及在使用电化学方法时如何避免生成不稳定的立方相,即闪锌矿,直接生成稳定的六边形相,即纤锌矿,而关于物理方法尤其是真空热蒸发技术的CdSe镀膜技术及该制备方法下其成膜效果和光学特性等方面的报道较少。随着真空热蒸发技术的不断成熟,其真空度要求高的技术缺点和成本高的缺点正在不断被弥补,而其制膜纯度高、生产效率高的优点越发明显。同时研究发现在真空热蒸发技术下制备的CdSe膜具有更优良的光学特性,这将为CdSe薄膜将来的广泛制备和推广使用创造显著的有利条件。This article mainly introduces the preparation of CdSe thin films and the research status and pro-gress of their optical properties both domestically and internationally. As an II-VI compound semi-conductor thin film, CdSe has always been a hot research and development topic both domestically and internationally. In the preparation process of CdSe thin films, different preparation methods will have a significant impact on their performance. Therefore, it is necessary to choose appropriate preparation methods for performance optimization and trade-off selection. In recent years, people have developed various technologies to prepare CdSe films, but the existing research mainly focuses on the preparation of CdSe films by electrochemical methods and how to avoid the formation of un-stable cubic phase, namely sphalerite, and directly generate stable hexagonal phase, namely wurtz-ite, However, there are few reports on physical methods, especially the CdSe coating technology of vacuum thermal evaporation technology, as well as its film forming effect and optical properties under this preparation method. With the continuous maturity of vacuum thermal evaporation technology, the technical shortcomings of high vacuum requirements and high cost are constantly being compensated, and the advantages of high membrane purity and high production efficiency are becoming increasingly apparent. At the same time, research has found that CdSe films prepared under vacuum thermal evaporation technology have better optical properties, which will create significant favorable conditions for the widespread preparation and promotion of CdSe films in the future.

关 键 词：CDSE薄膜 真空热蒸发 电化学方法 半导体薄膜 镀膜技术 光学特性 物理方法 真空度 

分 类 号：TB3[一般工业技术—材料科学与工程]