氮化硅脊波导在弯曲条件下折射率变化特性  

Refractive Index Variation Characteristics of Silicon Nitride Rib Waveguide under Bending Condition

作　　者：朱玉麟 孙德贵 徐亚萌 

机构地区：[1]长春理工大学,理学院,吉林 长春

出　　处：《应用物理》2022年第2期68-74,共7页Applied Physics

摘　　要：本文采用有限–差分方法模拟了绝缘体上氮化硅(Si3N4)脊型弯曲波导的折射率特性。基于弯曲波导的麦克斯韦方程,本文对弯曲波导芯层内折射率随波导半径与结构的变化进行了分析。进而,利用有限–差分算法的软件MODE Solutions的仿真结果表明,在脊型波导结构下,弯曲的波导结构随着弯曲半径的增加导致传输光中心发生偏移,造成TE/TM模式的有效折射率发生变化。该研究对于各波导器件中脊型波导弯曲设计评估具有重要意义。In this paper, the refractive index characteristics of silicon nitride (Si3N4) bent rib waveguide on Silicon-on-Insulator are simulated by finite-difference method. Based on the Maxwell’s equations of bent waveguides, the refractive index changes of the core with the radius and structure of a bent waveguide are analyzed. Then, our simulation results from the MODE Solutions of the Finite-Difference software show that, for a bent rib waveguide structure, the center of transmitted light shifts with the increase of bending radius, and the effective refractive index of TE/TM mode changes with the increase of bending radius. This research is of great significance for the design and evaluation of various bending rib waveguide devices.

关 键 词：氮化硅 脊波导 弯曲波导 有效折射率 

分 类 号：O4[理学—物理]