晶圆搬运机器人运动学分析与仿真  

Kinematics Analysis and Simulation of Wafer Handling Robot

作　　者：朱良洪 于大泳[1] 

机构地区：[1]上海理工大学机械工程学院,上海

出　　处：《建模与仿真》2021年第3期676-683,共8页Modeling and Simulation

摘　　要：本文选择实验室里的SCARA型搬运机器人作为研究对象,对其进行运动学分析与仿真。首先利用改进型MDH参数法建立各连杆的坐标系,确定D-H参数。接着推导出其运动学方程,利用MATLAB Robotics Toolbox进行运动仿真分析,验证模型的正确性,并使用蒙特卡洛法绘制出末端执行器的工作空间。最后,选择代数法进行逆运动学分析计算,得到运动学逆解,并在MATLAB中将求解过程封装成函数。通过此函数随机输入给定位姿都能得到给定位姿对应的最优逆解,证实了逆解算法的正确性。结果表明,对该晶圆搬运机器人的运动学分析正确,为后续的运动学标定与误差补偿奠定了坚实的理论依据。In this paper, the SCARA handling robot in the laboratory is selected as the research object, and its kinematics analysis and simulation are carried out. Firstly, the improved MDH parameter method is used to establish the coordinate system of each connecting rod and determine the D-H parameters. Then, the kinematics equation of the end-effector was derived, and the correctness of the model was verified by using the MATLAB Robotics Toolbox. The working space of the end-effector was plotted by using the Monte Carlo method. Finally, the algebraic method was used to analyze and calculate the inverse kinematics, the inverse kinematics solution was obtained, and the solution process was encapsulated as a function in MATLAB. The optimal inverse solution can be obtained by randomly inputting the orientation pose through this function, which verifies the correctness of the inverse solution algorithm. The results show that the kinematics analysis of the wafer handling robot is correct, which lays a solid theoretical basis for the subsequent kinematics calibration and error compensation.

关 键 词：晶圆搬运机器人 运动学分析 MATLAB 仿真验算 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]