周期性微偏振片阵列特性研究  

Study on Characteristics of PeriodicMicropolarizer Array

作　　者：陈星 于淼[1] 曹亮[1] 宋贵才[2] 王作斌[1] 

机构地区：[1]长春理工大学,国家纳米操纵与制造国际联合研究中心,吉林长春 [2]长春理工大学,理学院,吉林长春

出　　处：《现代物理》2019年第1期23-31,共9页Modern Physics

摘　　要：本文主要研究周期性微偏振片阵列的制备与偏振特性。首先采用电子束光刻技术制备周期性的铝纳米线栅阵列,其次利用聚焦离子束刻蚀技术制备不同深度的铝纳米线栅阵列。之后通过偏振光路测试系统表征铝纳米线栅阵列,讨论周期、深度对偏振片偏振性能的影响。实验结果表明,在可见光谱中适当减小光栅的周期、增加光栅结构的深度均可以改善周期性微偏振片阵列的偏振性能。In this paper, the fabrication of periodic micropolarizer arrays and their polarization characteristics are studied. Firstly, electron beam lithography was used to fabricate periodic aluminum nanowire grid arrays. Secondly, aluminum nanowire gratings with different depths were fabricated by focused ion beam etching. And then, the aluminum nanowire grid arrays were characterized by a polarized light path test system, and the influences of period and depth on the polarization per-formance of the polarizer were discussed. The experimental results show that the polarization performance of periodic micropolarizer arrays can be improved by appropriately reducing the period of the gratings and increasing the depth of the gratings in the visible spectrum.

关 键 词：微偏振片 聚焦离子束刻蚀 电子束光刻 铝纳米线栅阵列 偏振性能 

分 类 号：O43[机械工程—光学工程]