直排四探针法测量硅片电阻率及不确定度评定  

Measuring Resistivity of Silicon Wafers with Four-Point Probe Method and Evaluation of Uncertainty in Measurement

作　　者：高英[1] 李兰兰 

机构地区：[1]中国计量科学研究院,北京

出　　处：《材料科学》2019年第12期1041-1047,共7页Material Sciences

摘　　要：四探针电阻率测量仪广泛应用于半导体行业,是测量半导体材料电阻率的常用设备。本文针对不同样品测量时应注意的测量条件、适用的计算公式做了简要的说明,并对晶圆薄片的精密测量结果的不确定度评定做了比较详细的论述。Resistivity measuring instruments with four-point probe is widely used in semiconductor industry, and it is a common device for measuring resistivity of semiconductor materials. In this paper, the measurement conditions and applicable calculation formulas for different samples are briefly de-scribed, and the uncertainty evaluation of the precise measurement results of wafer is discussed in detail.

关 键 词：四探针 电阻率 不确定度 

分 类 号：TN3[电子电信—物理电子学]