国家自然科学基金(50971011)

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Focused ion beam built-up on scanning electron microscopy with increased milling precision被引量：1
《Science China(Physics,Mechanics & Astronomy)》2012年第4期625-630,共6页LUO Hu WANG HaiLong CUI YiMin WANG RongMing 
supported by the National Natural Science Foundation of China (Grant No. 50971011);Beijing Natural Science Foundation (Grant No. 1102025);Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20091102110038);the Fundamental Research Funds for the Central Universities (Grant No. 11174023)
In this work,a focused ion beam(FIB)-scanning electron microscopy(SEM) dual beam system was successfully built by integrating a FIB column and a graphics generator onto a SEM.Real-time observation can be realized by S...
关键词：FIB-SEM dual beam system milling precision INCREASE numerical simulation 
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