National Science and Technology Supporting Program,China(No.2011BAJ02B06);Aeronautical Science Foundation of China(No.20090738003);National Natural Science Foundations of China(No.51175378,No.50775161)
Jet pipe electro-hydraulic servo valve is the heart of feedback control systems,and it is one of the mechatronic components used for precision flow control application.It consists of several precision and ddicate comp...