国家重点基础研究发展计划(2006BAF06B06)

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Mixed polarization in determining the film thickness of a silicon sphere by spectroscopic ellipsometry
《Chinese Physics B》2012年第1期147-152,共6页Zhang Ji-Tao Wu Xue-Jian Li Yan 
Project supported by the National Key Technology Research and Development Program of the Ministry of Science and Technology of China(Grant No.2006BAF06B06);the Tsinghua University Initiative Scientific Research Program,China(Grant No.2009THZ06057)
The effect of a spherical shape on the measurement result of spectroscopic ellipsometry （SE） is analyzed, and a method to eliminate this effect is proposed. Based on the simulation result of the SE measurement on a ...
关键词：spectroscopic ellipsometry silicon sphere Avogadro constant METROLOGY 
Uncertainty reevaluation in determining the volume of a silicon sphere by spherical harmonics in an Avogadro project
《Chinese Physics B》2011年第9期152-158,共7页张继涛 吴学健 李岩 
Project supported by the National Key Technology Research and Development Program of the Ministry of Science and Technology of China (Grant No.2006BAF06B06);Tsinghua University Initiative Scientific Research Program,China (Grant No.2009THZ06057)
To determine the Avogadro constant with a target relative uncertainty of 2 x 10-s, the uncertainty component of the silicon sphere＇s volume introduced by the spherical harmonics method, which is usually used in deter...
关键词：METROLOGY Avogadro constant silicon sphere spherical harmonics 
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