Project supported by the Key Program of Natural Science Foundation of Guangdong Province of China (Grant Nos.10251063101000001 and 8251063101000006);the National Natural Science Foundation of China (Grant No.60878063)
Black silicon, produced by irradiating the surface of a silicon wafer with femtosecond laser pulses in the presence of a sulfur-bearing gas, is widely believed to be a potential material for efficient multi-intermedia...