国家自然科学基金(10775025)

作品数：4被引量：1H指数：1
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相关期刊：《Plasma Science and Technology》《Chinese Physics B》更多>>
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Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C_2H_2 discharges
《Chinese Physics B》2014年第8期402-407,共6页刘相梅 李奇楠 徐翔 
Project supported by the China Postdoctoral Science Foundation(Grant No.2012M511603);the National Natural Science Foundation of China(Grant Nos.11105057 and 10775025);the Fundamental Research Funds for the Central Universities of China(Grant No.DUT12LK39)
A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth, charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene （C2H2） dis...
关键词：nanoparticle dynamics acetylene discharges numerical simulation 
The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH_4/NH_3/N_2 plasmas: Two-dimensional simulations
《Chinese Physics B》2013年第4期338-343,共6页刘相梅 宋远红 姜巍 易林 
Project supported by the China Postdoctoral Science Foundation (Grant No. 2012M511603);the National Natural Science Foundation of China (Grant Nos. 11105057 and 10775025);the Natural Science Foundation of Hubei Province of China (Grant No. 2007ABA035);the Program for New Century Excellent Talents in University of China (Grant No. NCET-08-0073)
A two-dimensional （2D） fluid model is presented to study the behavior of silicon plasma mixed with SiH4 , N2 , and NH3 in a radio-frequency capacitively coupled plasma （CCP） reactor. The plasma–wall interaction ...
关键词：capacitively coupled plasma process conditions effects SiH4/NH3/N2 discharges 
One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH_4 /N_2 /O_2 Discharge
《Plasma Science and Technology》2012年第2期107-110,共4页王燕 刘相梅 宋远红 王友年 
supported by National Natural Science Foundation of China (No.10775025);Important National Science & Technology Specific Project of China (No.2011ZX02403-001);Program for New Century Excellent Talents in University of China (NCET-08-0073)
Driven by pulse modulated radio-frequency plasma in capacitively coupled discharge are studied by source, the behavior of SiH4/N2/02 using a one-dimensional fluid model. Totally, 48 different species （electrons, ions...
关键词：pulsed modulation SiH4/N2/02 discharge capacitively coupled plasma fluidmodel 
Driving frequency effects on the mode transition in capacitively coupled argon discharges被引量：1
《Chinese Physics B》2011年第6期323-328,共6页刘相梅 宋远红 王友年 
Project supported by the National Natural Science Foundation of China (Grant No. 10775025);the Scientific Research Fund of Liaoning Provincial Education Department for Colleges and Universities (Grant No. 2008T229);the Program for New Century Excellent Talents in University (Grant No. NCET-08-0073)
A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-613 MHz. The model inc...
关键词：capacitively coupled plasma mode transition Ar discharge 
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