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相关期刊：《Plasma Science and Technology》《Microsystems & Nanoengineering》更多>>
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Erosion research of CX-2002U carbon composites under low-temperature high-flux hydrogen plasma
《Plasma Science and Technology》2021年第2期93-100,共8页Hengxin GUO Zongbiao YE Bizhou SHEN Jianjun WEI Bo WANG Yuchuan LUO Kun ZHANG Fujun GOU Jianjun CHEN Bo CHEN 
by National Natural Science Foundation of China(No.11875198);Young Scientists Fund of National Natural Science Foundation of China(No.11905151);Fundamental Research Funds for the Central Universities of China(No.2019SCU12072);the China Postdoctoral Science Foundation(No.2019M663487).
The net erosion yield of CX-2002U carbon fiber composites under high-flux low-temperature hydrogen plasma is investigated using a linear plasma device.It is found that the net erosion yield decreases rapidly first,and...
关键词：carbon fiber composites hydrogen plasma chemical erosion REDEPOSITION NANOPARTICLE 
Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing被引量：4
《Microsystems & Nanoengineering》2019年第1期515-522,共8页B.X.E.Desbiolles A.Bertsch P.Renaud 
A novel fabrication method based on the local sputtering of photoresist sidewalls during ion beam etching is presented.This method allows for the manufacture of three-dimensional multimaterial nanostructures at the wa...
关键词：walls BEAM STEPS 
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