SERVO

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A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication
《Science China(Physics,Mechanics & Astronomy)》2016年第8期50-55,共6页Zhen Zhang Peng Wang Peng Yan YingChun Guan 
supported by Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry(Grant No.20121028120);the National Natural Science Foundation of China(Grant No.61327003);the Open Foundation of the State Key Laboratory of Fluid Power andMechatronic Systems(Grant No.GZKF-201413);the Fundamental Research Funds of Shandong University(Grant No.2015JC034);the National Key Basic Research Program of China(Grant No.2015CB059900);Beijing Natural Science Foundation(Grant No.3162019);the Fundamental Research Funds of Beihang University(Grant No.74003401)
A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is propos...
关键词：laser nanofabrication direct writing servo and control system 
Modified wavelet filtering algorithm applied to gyro servo technology for the improvement of test-precision被引量：3
《Journal of Systems Engineering and Electronics》2011年第3期488-492,共5页Yanbo Li Yu Liu Baoku Su Yansong Jiang 
supported by the National Basic Research Program of China (973 Program) (973-61334)
In order to improve the measurement-precision of the gyro,the gyro experiment is completed based on gyro servo technology.The error sources of gyro servo technology are analyzed in the process of measurement,and the i...
关键词：servo method error source threshold filtering killing. 
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