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Microscopic mechanical characteristics analysis of ultranano-crystalline diamond films
《Transactions of Nonferrous Metals Society of China》2015年第10期3291-3296,共6页丰杰 谢友能 李周 吴先哲 李建国 梅军 余志明 魏秋平 
Projects(51301211,21271188)supported by the National Natural Science Foundation of China;Project(2010A0302013)supported by the Foundation of China Academy of Engineering Physics;Project(ZZ13005)supported by the Foundation of Laboratory of Ultra Precision Manufacturing Technology of China Academy of Engineering Physics;Project(2012M521541)supported by the China Postdoctoral Science Foundation;Project(20110933K)supported by the State Key Laboratory of Powder Metallurgy,China;Project(CSU2013016)support by and the Open-End Fund for Valuable and Precision instruments of Central South University,China
The microscopic mechanical characteristics of ultranano-crystalline diamond films which were prepared in four different atmospheres were investigated for the applications in microelectron-mechanical system（MEMS）.The...
关键词：ultranano-crystalline diamond film NANOINDENTATION mechanical properties microelectron-mechanical system（MEMS） 
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