Projects(51301211,21271188)supported by the National Natural Science Foundation of China;Project(2010A0302013)supported by the Foundation of China Academy of Engineering Physics;Project(ZZ13005)supported by the Foundation of Laboratory of Ultra Precision Manufacturing Technology of China Academy of Engineering Physics;Project(2012M521541)supported by the China Postdoctoral Science Foundation;Project(20110933K)supported by the State Key Laboratory of Powder Metallurgy,China;Project(CSU2013016)support by and the Open-End Fund for Valuable and Precision instruments of Central South University,China
The microscopic mechanical characteristics of ultranano-crystalline diamond films which were prepared in four different atmospheres were investigated for the applications in microelectron-mechanical system(MEMS).The...