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GAS-ASSISTED: 作品数：8被引量：2H指数：1; 导出分析报告; 相关领域：化学工程更多>>; 相关期刊：《Nanomanufacturing and Metrology》《Microsystems & Nanoengineering》《Chemical Research in Chinese Universities》《World Journal of Engineering and Technology》更多>>; 相关基金：国家自然科学基金更多>>

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Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs: 《Nanomanufacturing and Metrology》2023年第4期16-23,共8页Jining Sun Lei Zhang Yi Zhang Yunlong Han Lei Zhang; The authors gratefully acknowledge the startup funding support by the Dalian University of Technology(DUT)(Award No.82232022,82232043,and DUT22LAB404)。; Focused ion beam (FIB) machining can be used to fabricate gallium arsenide-based devices, which have a surface fnish of several nanometers, and the FIB machining speed and surface fnish can be greatly improved using x...; 关键词：Focused ion beam Gas-assisted etching Refresh time GAAS