Project supported by the National Special Foundation of China for Major Science Instrument (No. 61227802);the National Natural Science Foundation of China (No. 61405120);the National Program on Key Basic Research Project (No. 2012CB825802);the China Postdoctoral Science Foundation (No. 2014M552224)
The fabrication of ordered, high aspect-ratio microstructures in silicon by use of photo-assisted electrochemical etching is an important technology, where voltage and current density are significant factors. In this ...