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funded by the Engineering and Physical Sciences Research Council(EPSRC)of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology(Grand Ref:EP/I033424/1);the EPSRC Future Advanced Metrology Hub(EP/P006930/1).
This paper presents a short review for phase measuring deflectometry (PMD). PMD isa phase calculation based technique for three-dimensional (3D) measurement ofspecular surfaces. PMD can achieve nano-scale form measure...