SHEATH

作品数:215被引量:309H指数:8
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相关机构:湖南农业大学湖南化工研究院大连医科大学大连医科大学附属第一医院更多>>
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Numerical study of low-frequency discharge oscillations in a 5kW Hall thruster
《Plasma Science and Technology》2018年第7期145-151,共7页Le YANG Tianping ZHANG Juanjuan CHEN Yanhui JIA 
A two-dimensional particle-in-cell plasma model is built in the R-Z plane to investigate the low- frequency plasma oscillations in the discharge channel of a 5 kW LHT-140 Hall thruster. In addition to the elastic, exc...
关键词:Hall thruster low-frequency oscillations SHEATH Coulomb collisions 
Effects of Low-Frequency Source on a Dual-Frequency Capacitive Sheath near a Concave Electrode
《Plasma Science and Technology》2014年第4期320-323,共4页郝美兰 戴忠玲 王友年 
supported by Handan Science and Technology Research and Development Project of China(No.1121120069-5);the Scientific Research Start-up Funds of Doctor and Master of Handan College of China(No.2010005);National Natural Science Foundation of China(Nos.11335004 and 11375040);the Important National Science and Technology Specific Project of China(No.2011ZX02403-001)
A self-consistent two-dimensional (2D) collisionless fluid model is developed to sim- ulate the effects of the low-frequency (LF) power on a dual frequency (DF) capacitive sheath over an electrode with a cylindr...
关键词:capacitively coupled plasma SHEATH fluid two dimension LF power 
Simulation of cold plasma in a chamber under high- and low-frequency voltage conditions for a capacitively coupled plasma被引量:1
《Journal of Semiconductors》2012年第10期42-47,共6页郝道欣 程嘉 季林红 孙钰淳 
supported by the Important National Science & Technology Specific Projects No.2(No.2011ZX02403-004);the Independent Research Subject from the State Key Laboratory of Tribology in Tsinghua University(No.SKLT11C2)
The characteristics of cold plasma,especially for a dual-frequency capacitively coupled plasma(CCP), play an important role for plasma enhanced chemical vapor deposition,which stimulates further studies using differ...
关键词:plasma CFD-ACE+ HF LF VOLTAGE SHEATH 
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