We also thank DuPont for providing the polyimide membrane samples.This work was supported by the National Science Foundation under Grant Number DBI-1353870,which was offered to S-YZ and TCB.
We report the design,fabrication and characterization of a microelectromechanical systems(MEMS)flow control device for gas chromatography(GC)with the capability of sustaining high-temperature environments.We further d...