This work was supported by the National Basic Research Program of China(No.2003CB314901);the 111 Project(B07005);the Program for New Century Excellent Talents in University of China(NCET-05-0111).
Top-illuminated metamorphic In0.53Ga0.47As p-i-n photodetectors are grown on the ultrathin low- temperature InP buffered GaAs substrates. Photodetectors with the 300-nm-thick In0.53Ga0.47As absorption layer show a typ...