National Key Research and Development Program(2016YFB0901600);Science and Technology Commission of Shanghai(16JC1401700,16ZR1440500);National Natural Science Foundation of China(51672301);The Key Research Program of Chinese Academy of Sciences(QYZDJ-SSW-JSC013,KGZD-EW-T06);CAS Center for Excellence in Superconducting Electronics,and Youth Innovation Promotion Association CAS