Project supported by the National Natural Science Foundation of China(Grant No.62075165);the National Key Research and Development Program of China(Grant Nos.2022YFF0607600 and 2022YFF0605502);the Special Development Funds for Major Projects of Shanghai Zhangjiang National Independent Innovation Demonstration Zone(Grant No.ZJ2021ZD008);the Shanghai Natural Science Foundation(Grant No.21ZR1483100);the Shanghai Academic/Technology Research Leader(Grant No.21XD1425000);the Opening Fund of Shanghai Key Laboratory of Online Detection and Control Technology(Grant No.ZX2020101)。
Chromium atom photolithography gratings are a promising technology for the development of nanoscale length standard substances due to their high accuracy,uniformity,and consistency.However,the inherent difference betw...
supported by the National Key Research&Development Program of China(2022YFC3701000);the National Natural Science Foundation of China(41975166 and 42175135);Jiangsu Natural Science Fund for Excellent Young Scholars(BK20211594);the Science and Technology Commission of the Shanghai Municipality(20ZR1447800)。