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A quantitative investigation of the influence with the components of the CMP alkali slurry on the polishing rate
《Journal of Semiconductors》2015年第9期143-148,共6页樊世燕 刘恩海 张军 刘玉岭 王磊 林凯 孙鸣 石陆魁 
Project supported by the Special Project Items No.2 in National Long-Term Technology Development Plan,China(No.2009ZX02308);the Natural Science Foundation of Hebei Province,China(No.F2013202104)
The influence of the components of an alkali polishing slurry and the mutual influences on the Cu polishing rate were investigated by a CMP polishing rate prediction model established with a modified artificial neural...
关键词：polishing slurry polishing rate sensitivity analysis artificial neural network artificial bee colonyalgorithm 
T-QoS-aware based parallel ant colony algorithm for services composition被引量：2
《Journal of Systems Science & Complexity》2015年第5期1100-1106,共7页Lin Zhang Kaili Rao Ruchuan Wang 
supported by the National Natural Science Foundation of China(61402241;61170065;61373017;61171053;61103195;61203217;61201163;61202004;61202354);Scientific&Technological Support Project(Industry)of Jiangsu Province(BE2012183;BE2012755);Natural Science Key Fund for Colleges and Universities of Jiangsu Province(11KJA520001;12KJA520002);the Natural Science Fund for Colleges and Universities of Jiangsu Province(13KJB520017);Scientific Research&Industry Promotion Project for Higher Education Institutions(JHB2012-7);the Priority Academic Program Development of Jiangsu Higher Education Institutions(PAPD)(yx002001)
In order to make cloud users get credible, high-quality composition of services, the trust quality of service aware(TQoS-aware) based parallel ant colony algorithm is proposed. Our approach takes the service credibili...
关键词：services composition trust service quality ant colonyalgorithm PARALLEL 
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