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Heterodyne Standing-Wave Interferometer with Improved Phase Stability被引量：1
《Nanomanufacturing and Metrology》2021年第3期190-199,共10页Ingo Ortlepp Jens-Peter Zollner Ivo W.Rangelow Eberhard Manske 
funded by the German Federal Ministry of Education and Research under contract 03V0235.
This paper describes a standing-wave interferometer with two laser sources of different wavelengths,diametrically opposed and emitting towards each other.The resulting standing wave has an intensity profile which is m...
关键词：Standing wave INTERFEROMETER HETERODYNE Ultrathin photo diode 
Tip-and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas
《Nanomanufacturing and Metrology》2021年第3期132-148,共17页Ingo Ortlepp Thomas Frohlich Roland FuBl Johann Reger Christoph Schaffel Stefan Sinzinger Steffen Strehle ReneTheska Lena Zentner Jens-Peter Zollner Ivo WRangelow Carsten Reinhardt Tino Hausotte Xinrui Cao Oliver Dannberg Florian Fern David Fischer Stephan Gorges Martin Hofmann Johannes Kirchner Andreas Meister Taras Sasiuk Ralf Schienbein Shraddha Supreeti Laura Mohr-Weidenfeller Christoph Weise Christoph Reuter Jaqueline Stauffenberg Eberhard Manske 
supported by the Deutsche Forschungsgemeinschaft(DFG)in the framework of the Research Training Group Tip-and Laser-based 3D-Nanofabrication in extended macroscopic working areas(GRK 2182)at the Technische Universitat Ilmenau,Germany.
The field of optical lithography is subject to intense research and has gained enormous improvement.However,the effort necessary for creating structures at the size of 20 nm and below is considerable using conventiona...
关键词：Nanomeasuring NANOPOSITIONING NANOMANUFACTURING Scale-spanning Tip-based Laser-based Nanofabrication 
Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine
《Nanomanufacturing and Metrology》2021年第3期149-155,共7页Laura Mohr-Weidenfeller Annika-Verena Hacker Carsten Reinhardt Eberhard Manske 
the support by the Deutsche Forschungsgemeinschaft(DFG)in the framework of Research Training Group Tip-and laser-based 3D-Nanofcibrication in extended macroscopic working areas(GRK 2182)at the Technische Universitat Ilmenau,Germany;financial support from the DFG from the grant RE3012/4-1.
Since the first realization of two-photon direct laser writing(DLW)in Maruo et al.(Opt Lett 22:132-134,1997),the manufacturing using direct laser writing techniques spread out in many laboratories all over the world.P...
关键词：Direct laser writing Nanopositioning and nanomeasuring machine Two-photon absorption Laser power controlling 
Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes
《Nanomanufacturing and Metrology》2021年第3期156-164,共9页Ralf Schienbein Florian Fern Rene Theska Shraddha Supreeti Roland FuBl Eberhard Manske 
the support of the Deutsche Forschungsgemeinschaft(DFG)in the framework of Research Training Group“Tip-and laser-based 3D-nanofabrication in extended macroscopic working areas”(GRK 2182)at the Technische Universitat Ilmenau,Germany。
The majority of nanopositioning and nanomeasuring machines(NPMMs)are based on three independent linear movements in a Cartesian coordinate system.This in combination with the specific nature of sensors and tools limit...
关键词：Multiaxial nanopositioning and nanomanufacturing Ultra-precision machine designs 5-Axis operation Ultraprecision rotations 
Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines
《Nanomanufacturing and Metrology》2021年第3期181-189,共9页Florian Weigert Roman Hebenstreit Roland FuBl Rene Theska 
the support by the Deutsche Forschungsgemeinschaft(DFG)in the framework of Research Training Group"Tip-and laser-based 3D-Nanofabrication inextended macroscopic working areas"(GRK 2182)at the Technische Universiat Ilmenau,Germany.
Nanomeasuring machines developed at the Technische Universitat Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties.Due to the requirements for these processes,a high...
关键词：Tool changing Kinematic coupling Measurement setup Uncertainty analysis Precision design 
Lorentz Force Velocimetry for Poorly Conducting Fluids-Development and Validation of a Novel Flow Rate Measurement Device
《Journal of Iron and Steel Research International》2012年第S2期613-616,共4页WEGFRASS Andre RESAGK Christian DIETHOLD Christian FRHLICH Thomas WERNER Michael HALBEDEL Bernd THESS Andre 
Item Sponsored by German Science Foundation (Deutsche Forschungsgemeinschaft) in the framework of theResearch Training Group (Graduiertenkolleg) "Lorentz Force Velocimetry and Lorentz Force Eddy Current Testing"(GRK 1567/1)at Ilmenau University of Technology
The paper demonstrated the feasibility of Lorentz Force Velocimetry for flow rate measurements of weakly conducting electrolytes using experimental results on salt water flow exposed to a permanent magnet system.This ...
关键词：Lorentz force velocimetry flow measurement electrolytes non-contact measurement 
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