基于CO_(2)激光加工ABF盲孔参数模型的研究  

Research on a parameter model based on CO_(2)laser drilling of ABF blind via

作　　者：熊佳 冯天时 陆然 张日艺 季鑫 Xiong Jia;Feng Tianshi;Zhang Riyi;Ji Xin

机构地区：[1]广州广芯封装基板有限公司,广东广州510700

出　　处：《印制电路信息》2024年第S02期278-284,共7页Printed Circuit Information

摘　　要：随着ABF载板结构和设计的多样化,激光钻孔技术变得越来越重要,同时激光钻孔参数的数量也变得越来越多。本文通过统计学原理,考察了CO_(2)激光钻基准能量和光罩直径对ABF盲孔孔径的影响,建立了一个基准能量,光罩直径与ABF盲孔的线性回归模型。测试结果表明,该模型在一定的基准能量范围内具有较高的拟合度和可行性。With the diversification of ABF carrier structure and design,laser drilling technology is becoming more and more important,and the number of laser drilling parameters is also increasing.In this paper,the influence of CO_(2)laser drilling reference energy and mask diameter on ABF blind hole aperture is investigated by statistical principle,and a linear regression model of reference energy,mask diameter and ABF blind hole is established.The test results show that the model has a high degree of fit and feasibility in a certain reference energy range.

关 键 词：CO_(2)激光加工 ABF膜 盲孔 线性回归模型 

分 类 号：TN41[电子电信—微电子学与固体电子学]