开放式半导体微纳加工平台的开放管理模式探讨  

Exploration on open management model of semiconductor micro-nano processing platform

作　　者：王英[1] 程秀兰[1] 马玲[1] 付学成[1] 瞿敏妮 沈赟靓[1] WANG Ying;CHENG Xiulan;MA ling;FU Xuecheng;QU Minni;SHEN Yunliang(Platform for Advanced Electronic Materials and Devices,Shanghai Jiaotong University,Shanghai 200240,China)

机构地区：[1]上海交通大学先进电子材料与器件校级平台,上海200240

出　　处：《实验技术与管理》2020年第2期229-232,共4页Experimental Technology and Management

摘　　要：大型仪器设备共享是节约社会资源的重要手段。该文以上海交通大学先进电子材料与器件校级平台为基础,从实验室环境、设备工艺、物资需求、研究方向、人员等方面系统分析和总结了开放式半导体微纳加工平台的特点,并对实验平台开放所面临的挑战进行了探讨,为开放式半导体微纳加工平台的建设和管理提供借鉴和参考。Sharing of large-scale instruments and equipment is the important means to save social resources.Based on the university level platform for advanced electronic materials and devices of Shanghai Jiaotong University,this paper systematically analyzes and summarizes the characteristics of the open platform for semiconductor micro-nano processing from laboratory environment,equipment and technology,material demand,research direction,personnel,etc.,and at the same time,explores upon the challenges faced by the opening of the experimental platform in order to provide reference for the construction and management of the open platform for semiconductor micro-nano processing.

关 键 词：微纳加工平台 开放式平台 管理模式 

分 类 号：TN305[电子电信—物理电子学]