超精密点对点运动3阶轨迹规划算法与实现  

Third-order profile planning algorithm and implementation for high accuracy point-to-point motion

作　　者：穆海华[1] 周云飞[1] 严思杰[1] 韩爱国[1] 

机构地区：[1]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2007年第12期58-61,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(50245011);国家重点基础研究发展计划资助项目(2003CB716206)

摘　　要：分析了3阶轨迹轮廓可能存在的各种情形,在总结各种轨迹情形图形特征的基础上,建立了用来预判别以上情况的3个基准:速度-加速度准则、距离-加速度准则和距离-速度准则.依据该基准与给定系统约束,提出了一种轨迹全过程的快速预处理方法,实现了点对点运动时间优化;结合轨迹轮廓图形的对称性与面积求积分法,给出了一种简单的公式推导方法.在此基础上,给出了3阶轨迹规划的精确算法及其实现流程.实例证明了该算法的快速性、有效性、可靠性及灵活性.该算法已成功应用于超精密半导体加工装备的研发中.All available instances for third-order profile planning firstly were analyzed.To identify that,three criteria were presented relying on profile characteristics.Hereafter a fast preprocessing approach considering the profile as a whole was given based on three criteria above and system constraints.And also time-optimality of the profile was obtained.The relevant formulas were easily derived with combination geometrical symmetry of profile and area method.As a result,accurate algorithm and its implementation...

关 键 词：轨迹规划 点对点运动 约束基准 快速预处理 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]