过渡层类型对类金刚石薄膜性能的影响  

Effects of Different Buffer Layer on he Properties of Diamond-like Carbon

作　　者：聂君兰[1] 谷坤明[1] 汤皎宁[1] 刘力 

机构地区：[1]深圳大学材料科学与工程学院深圳市特种功能材料重点实验室,广东深圳518060

出　　处：《润滑与密封》2008年第2期87-89,108,共4页Lubrication Engineering

基　　金：深圳市科技计划项目(QK200601)

摘　　要：采用电子回旋微波等离子体气相沉积和磁控溅射法相结合的方法,通过石墨靶材和金属钛靶在不锈钢和Al2O3陶瓷基片上沉积了具有不同过渡层的含钛的C薄膜,研究了不同薄膜与衬底的中间层类型对薄膜的表面形貌、硬度、摩擦磨损性能、表面能的影响。结果表明,导电基底更有助于成膜的致密性和均匀性,薄膜为衬底/Ti/TiN/TiCN/C结构时硬度最高。Ti doped carbon thin films with different buffer layers on stainless steel and Al2O3 ceramics substrates were fabricated by sputtering graphite and Ti targets and using electron cyclotron resonance plasma sputtering and magnetron sputtering.The influence of different buffer layer on the properties of the thin films such as surface topography,hardness,tribological properties and surface energy was studied.It is found that the density and uniformity of the films are improved with conductive substrate.The high...

关 键 词：ECR镀膜 类金刚石薄膜 含金属碳膜 缓冲过渡层 

分 类 号：TB381[一般工业技术—材料科学与工程]