含钇螯合物制备及感光性研究  

Preparation of Chelate Complex with Y Ions and Their Photosensitivity

作　　者：赵高扬[1] 张黄莉[1] 薛人中[1] 

机构地区：[1]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《稀有金属》2006年第z2期35-39,共5页Chinese Journal of Rare Metals

基　　金：国家自然科学基金(904401009);国家重点基础研究项目(2003CCA03300)资助

摘　　要：以甲醇为溶剂,二乙烯三胺为络合剂,醋酸钇为前驱物,采用溶胶-凝胶与化学修饰相结合的方法制备了含钇螯合物凝胶薄膜。研究了这种凝胶膜的紫外、红外光谱特性,发现了在330 nm处有与含钇螯合物相关的吸收峰,这种凝胶薄膜对紫外光具有感光特性,即当紫外光照射薄膜后,含钇螯合物相关的吸收峰逐渐变弱,含钇螯合物分解。伴随着螯合物的分解,薄膜在有机溶剂中的溶解性会发生显著变化,利用这种特性,紫外光通过掩膜照射凝胶薄膜,用有机溶剂溶洗后获得凝胶薄膜的微细图形;经过600℃热处理30 min,得到了具有立方相氧化钇薄膜的微细图形。Chelate rings with Y ion gel films were fabricated by sol-gel process with methanol as solvent,yttrium acetate as precursor and benzalacetone(BzAcH) as chemical modification.The UV-absorption spectra and FT-IR spectra of chelate rings with Y ions sol and gel films were investigated.The absorption band at around 330 nm correspond to the chelate rings with Y ions was detected.The gel films show photosensitivity in the UV range.It is found that the absorption band correspond to the chelate rings is weaken and dissociated after UV-irradiation,and simutaneously the solubility in some organic sovent is changed remarkably. Utilizing such characteristics,chelate rings with Y ion films with fine patterns can be obtained by irradiating gel film with UV light via pattern mask and dissolving the non-irradiated area in suitable solvent and annealing at 600 ℃ for 30 min.The XRD shows that Y2O3 fine pattern films are of cubic phase.

关 键 词：溶胶-凝胶法 含钇螯合物 化学修饰 微细图形 

分 类 号：O614.3[理学—无机化学]